Test probe substrate

ABSTRACT

A test probe structure having a planar surface and contact locations matched to test hardware is provided. The fabrication of the test probe structure addresses problems related to the possible deformation of base substrates during manufacture. Positional accuracy of contact locations and planarity of base substrates is achieved using dielectric layers, laser ablation, injection molded solder or redistribution layer wiring, and planarization techniques.

CROSS REFERENCE TO RELATED APPLICATION

This application is a division of U.S. patent application Ser. No.14/495,606 filed Sep. 24, 2014, the complete disclosure of which isexpressly incorporated herein by reference in its entirety for allpurposes.

FIELD

The present disclosure relates to the physical sciences, and, moreparticularly, to test probe structures and methods of fabricationthereof.

BACKGROUND

Integrated circuits can be mass produced by forming arrays of chips onsemiconductor wafers. The wafers can be subsequently diced in order toform dies, each die including a circuit. Test probes are employed fortesting integrated circuits, either as parts of a wafer or as discretechips. The electrical characteristics of an integrated circuit aretested to ensure they conform to specifications and/or will perform asintended. Integrated circuit chips include surface contacts comprised ofcontact pads, solder bumps (e.g. C4 bumps), or other types of electricalcontacts. Conductors corresponding to the surface contact locations ofthe integrated circuit chips are provided on test probes.

SUMMARY

Principles of the present disclosure provide an exemplary fabricationmethod that includes obtaining a structure comprising a test probesubstrate including a top surface, one or more contact locations, andelectrical conductors within the substrate, the contact locations beingelectrically connected to one or more of the electrical conductors, andforming a first dielectric layer over the top surface of the substrate.A plurality of first openings is formed within the first dielectriclayer, thereby exposing the contact locations. Lateral extensions of oneor more of the openings are formed within the first dielectric layer. Anelectrically conductive material is deposited within the first openingsand lateral extensions. The method further includes depositing a seconddielectric layer over the first dielectric layer and forming a pluralityof second openings within the second dielectric layer, one or more ofthe second openings communicating with the lateral extensions. Anelectrically conductive material is deposited within the second openingsto form an array of electrical contact regions electrically connected tothe contact locations. The second dielectric layer is planarized.

A further exemplary fabrication method includes obtaining a test probesubstrate including a top surface and a plurality of contact locationselectrically connected to one or more electrical conductors anddetermining whether the contact locations match predetermined coordinatepositions. A first dielectric layer is formed over the top surface ofthe substrate and a plurality of first openings are formed within thefirst dielectric layer, thereby exposing a plurality of the contactlocations. Lateral extensions of the first openings are formed in thedirections of the predetermined coordinate positions for the contactlocations that do not match the predetermined coordinate positions. Anelectrically conductive material is deposited within the first openingsand lateral extensions such that the conductive material contacts thecontact locations. A second dielectric layer is deposited over the firstdielectric layer. A plurality of second openings are formed within thesecond dielectric layer matching the predetermined coordinate positions,one or more of the second openings communicating with the lateralextensions. An electrically conductive material is deposited within thesecond openings to form an array of electrical contact regionselectrically connected to the contact locations and conforming to thepredetermined coordinate positions. The second dielectric layer isplanarized.

A test probe structure in accordance with an exemplary embodimentincludes a substrate including a top surface, a plurality of rows ofcontact locations, and electrical conductors within the substrate, thecontact locations being electrically connected to one or more of theelectrical conductors, one or more of the contact locations beingmisaligned with respect to one or more of the rows. A first dielectriclayer is on the top surface of the substrate. A plurality of firstopenings corresponding to the contact locations extend through the firstdielectric layer, each of the first openings being aligned with acorresponding one of the contact locations. At least one of the firstopenings corresponds to one of the misaligned contact locations andincludes a lateral extension. A second dielectric layer is positionedover the first dielectric layer. A plurality of second openings extendsthrough the second dielectric layer, the second openings being arrangedin rows corresponding to the rows of contact locations. The secondopenings are arranged in rows without misalignment. An electricallyconductive material is within each of the first and second openings andthe lateral extension, the electrically conductive material contactingthe contact locations. The second dielectric layer includes a planar topsurface.

As used herein, “facilitating” an action includes performing the action,making the action easier, helping to carry the action out, or causingthe action to be performed. Thus, by way of example and not limitation,instructions executing on one processor might facilitate an actioncarried out by instructions executing on a remote processor, by sendingappropriate data or commands to cause or aid the action to be performed.For the avoidance of doubt, where an actor facilitates an action byother than performing the action, the action is nevertheless performedby some entity or combination of entities.

Test probe structures and fabrication methods as disclosed herein canprovide substantial beneficial technical effects. For example, one ormore embodiments may provide one or more of the following advantages:

-   -   Effective use of probe substrate materials subject to        distortion;    -   Corrections for non-planarity of probe substrates;    -   Corrections for positional inaccuracy of probe contact        locations;    -   Enables use of LTCC (low temperature co-fire ceramic) substrate        or glass or silicon substrates, which have a coefficient of        thermal expansion near or matched to silicon;    -   Enables use of high modulus substrate base such as LTCC        substrate to both facilitate uniformity of applied force to        probes on substrate and to minimize non-coplanarity of probes        with or without applied mechanical force and across temperature        ranges of testing dies and/or wafers;    -   Effective design of wafer probe substrate to support high power        delivery during test (current) and low voltage to support full        power/pulsed power and at speed testing of circuits.    -   Power levels of >200 watts per die and current of 0.1 amps per        pin to over 1 amp per pin are possible with proper choice of        base substrate, probe and low contact resistance;    -   Effective design of wafer probe substrate to support low        frequency (MHz) to high frequency (GHz) test measurements such        as with using short distance connections, appropriate        pitch/spacing of input-output signals and shielded wiring;    -   Enables use of single die to multiple die or wafer level test        probe substrates, providing flexibility to have high throughput        to meet low cost and volume applications;    -   Testing of multiple products using the same test probe        substrates.

These and other features and advantages will become apparent from thefollowing detailed description of illustrative embodiments thereof,which is to be read in connection with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic top plan illustration of a test probe substratebase including a plurality of vias or via pads, some of which are not inposition to match test hardware;

FIG. 2 is a schematic top plan illustration of the substrate of FIG. 1including a dielectric layer formed thereon and processed to provideopenings in the dielectric layer;

FIG. 3 is a schematic illustration showing a solder injection head andthe substrate following injection of molten solder within the openingsin the dielectric layer;

FIG. 4 is a schematic top plan illustration of the structure of FIG. 3showing a second dielectric layer deposited on the substrate, opened toform a desired grid, and following injection of molten solder by thesolder injection head;

FIG. 5A is a schematic side elevation view of a first embodiment of atest probe structure formed in accordance with a first exemplary method;

FIG. 5B is an enlarged sectional view of a portion of the structureshown in FIG. 5A;

FIG. 6 is a schematic side elevation view of an alternative embodimentof a test probe structure formed in accordance with the steps shown inFIGS. 1-4, and

FIG. 7 is a schematic side elevation view of a further alternativeembodiment of a test probe structure including an interposer layer.

DETAILED DESCRIPTION

Test probes used for testing integrated circuits include electricalcontacts intended for contacting surface pads or other contactstructures formed on IC chips. Such contact structures may be employedfor power connections or I/O signals. Substrate materials employed forfabricating test probes may be subject to deformation, thereby causingmisalignment of the electrical contacts on the test probe substrate.Ceramic substrate materials, for example, offer good strength andrigidity. Such substrates are typically fabricated using a sinteringprocess. Wiring layers are formed within the substrate, which maycomprise ceramic layers, for electrically connecting the probe contactswith testing equipment. The ceramic material undergoes shrinkage andpossible distortion if the shrinkage is non-uniform. Such distortion canresult in misalignment of the electrical contacts on the probe substratewith the corresponding contacts on an integrated circuit to be tested.It can further result in a loss of planarity of the surface thatincludes the electrical contacts.

Referring to FIG. 1, a top plan view of a test probe substrate basefollowing a sintering process is provided. In one or more embodiments,the substrate base comprises LTCC (low temperature co-fire ceramic)having a coefficient of thermal expansion near or matched to silicon soprobes can support tests at die level up to wafer level across a rangeof temperatures from less than 0° C. to greater than 100° C. The use ofa high modulus ceramic substrate base such as an LTCC substratefacilitates uniformity of the applied force when the probe is employedfor testing and minimizes non-coplanarity of probes with or withoutapplied mechanical force and across the temperature range(s) of thetesting dies and/or wafers. As shown schematically, contact locations22, 22A forming rows of via conductors or via pads are formed in thesubstrate 20. The contact locations are on the substrate surface in theexemplary embodiment. Electrical conductors within the substrate 20 areelectrically coupled to the via conductors or via pads. The electricalconductors may be comprised, at least in part, by the via conductors.The array of such via conductors or pads exposed at the illustratedsurface of the substrate base is intended to correspond in someembodiments to surface contacts of an integrated circuit or otherelectronic device to be tested. In this exemplary embodiment, thearrangement of the rows and columns of via conductors or via pads onlypartially conforms to the desired configuration wherein the rows andcolumns would be parallel and the via conductors or via pads would beequally spaced. In some test probe substrates, such as ceramicsubstrates, distortion tends to be greater near the periphery of thesurface than near the middle portion thereof. As shown in FIG. 1, someof the contact locations 22A at the corner portions of the array aremisaligned. The rows of contact locations are accordingly not entirelylinear nor are the rows entirely parallel to each other as desired. Inaddition to the positional inaccuracy of the contact locations 22A, theillustrated surface is non-planar. The X, Y and Z coordinates of some ofthe contact locations accordingly are not suitable for matching the testhardware (not shown). The contact locations 22, 22A are mapped andstored, preferably electronically in a memory device, for futurereference. These locations are compared to a set of predeterminedcoordinate positions that, for example, match the coordinate positionsof the electrical contact surfaces of test hardware. As discussed below,the positional inaccuracy of the contact locations and non-planarity ofthe base substrate are both addressed in order to provide probecompatibility with the electronic devices to be tested and/orintermediate structures.

Referring to FIG. 2, a first dielectric layer 24 is provided on thesurface of the substrate 20 shown in FIG. 1. In one exemplaryembodiment, the first dielectric layer comprises a polyimide adhesivethat is laminated or spun on the base substrate 20 and cured. In someexemplary embodiments, a polyimide adhesive layer having a thicknessbetween three and ten microns is formed. A thicker dielectric layer, forexample between fifty and one hundred microns, may be employed in otherembodiments. The dielectric layer 24 may comprise a single layer or aseries of layers. A mask (not shown) is provided on the dielectric layer24. The mask facilitates patterning of the dielectric layer to open thecontact locations 22, 22A through use of the stored data relating tocontact location positions. A laser is employed in some embodiments tocut through the dielectric layer 24. As shown in FIG. 2, the openings 26in the dielectric formed by laser ablation are round where the contactlocations 22 are satisfactory. With respect to the contact locations 22Athat are not in true X, Y and/or Z coordinate positions, tails 28 areformed in the dielectric layer 24 that extend from the round openings inthe appropriate directions. The round portions of the openings are inregistration with the contact locations 22, 22A while the tails 28extend in the directions of the correct locations for matching to testhardware or other elements. It will be appreciated that the openings 26may include laterally extending portions having configurations thatdiffer from those of the tails 28 shown in the figures.

Referring to FIG. 3, wiring 30 is provided by the injection of moltensolder into the openings 26 and tails 28 in one exemplary embodiment.This may be accomplished by passing an injection mold solder (IMS) head32 over the surface of the patterned dielectric layer 24 formed on thebase substrate 20. The head 32 includes a solder slot 34 that providesmolten solder to the surface of the dielectric layer, filling theopenings 26 down to the contact locations 22, 22A as well as filling thelaterally extending tails 28. The solder injection process is conductedin a low oxygen environment, preferably less than 10,000 ppm oxygen in anitrogen or forming gas environment. The IMS head 32 may further includean optional blade (not shown) that contacts the surface of thedielectric layer to prevent solder leakage. U.S. Pat. Nos. 5,244,143 and7,784,673, which are incorporated by reference, disclose techniques andapparatus for filling cavities with molten solder. The contact locations22, 22A may include a nickel/gold finish or other suitable finish tofacilitate wetting. The wiring 30 may be formed by processes other thanmolten solder injection. Exemplary processes include sputter depositedmetallurgy and plated metallurgy. The surface of the substrate 20, whichnow includes the first dielectric layer 24, is planarized in someembodiments following the deposition of the wiring layer to provide aplanar surface and to remove any excess metallurgy. Planarizingdielectric layer(s) formed prior to deposition of a final dielectriclayer is beneficial when planarity is far from specification, but is notrequired when close to target specifications. As discussed above, in oneor more exemplary embodiments, the contact locations are compared to aset of predetermined coordinate positions that correspond to the targetspecifications. This information is used to determine whetherplanarization can be satisfactorily effected by planarizing only thefinal dielectric layer or whether one or more intermediate dielectriclayers, such as the first layer 24, requires planarization. In oneexemplary embodiment, the dielectric layer has an initial thickness ofabout five microns. A grinding or chemical mechanical polishing (CMP)process is employed if appropriate to form a planar surface having anaverage thickness of about two microns. Typically, planarization isutilized for each deposition layer but is particularly important withrespect to the final deposition layer if the targeted specification ofthe probe planarity has not been achieved (for example, 2 μm in somefine pitch probe testing applications). The thickness of the resultingdielectric layer 24 may or may not be uniform depending on the surfacecharacteristics of the substrate 20.

In some embodiments, the deformation of the base substrate 20 mayrequire the deposition of one or more additional dielectric and wiringlayers. Each additional dielectric layer would be patterned and providedwith corrective wiring to achieve positional accuracy using RDL(redistribution layer) processing. In one or more embodiments, openingsand tails similar to those shown in FIG. 2 are formed in subsequentdielectric layers. Further processing (e.g. CMP) is preferably, thoughnot necessarily, performed following deposition of each dielectric layerto obtain a substantially planar surface on the resulting structure and,if applicable, to facilitate the deposition of molten solder. Asdiscussed above, planarization of the final dielectric layer may beparticularly important to meet product specifications.

Once the positional accuracy of the contact locations is acceptable viaredistribution as described above, a final dielectric layer 38 may bedeposited and patterned. In one exemplary embodiment, the finaldielectric layer 38 is a second such layer deposited on the first layer24. Openings 40 are formed in the dielectric layer 38 as shown in FIG.4. Referring to FIG. 3 for exemplary purposes, some of the openings 40are aligned with the contact locations 22 and openings 26 in theunderlying dielectric layer 24. Other openings 40 are aligned with thetails 28 formed in the underlying dielectric layer 24 as the underlyingcontact locations 22A corresponding to some of the openings 40 aremisaligned. As no further adjustment for contact location inaccuracy isnecessary in this exemplary embodiment, none of the openings 40 requiresan extension in any direction. The openings 40 within the finaldielectric layer 38 which forms the top surface of the test probesubstrate form parallel rows with no misaligned openings. In theexemplary embodiment of FIG. 4, the openings 40 are round. The openingscan be formed by laser ablation or etching. The openings 40 are filledwith an electrically conductive material such as solder. Exemplarymaterials for filling the openings 40 include Sn/Ag/Cu with Sn 96.5%,/Ag2.5%/Cu 1%, SnCu with Sn 98.3% /Cu 1.7%, and Cu₆/Sn₅ or other metalliccompounds. The dielectric layer 38 is planarized by CMP or othersuitable process in one or more exemplary embodiments. An injectionmolded solder process as described above may again be employed to extendthe wiring 30 formed in previous step(s). In some applications, theperimeter of the substrate 20 is removed by grinding to permit thecontact area of the structure to extend above the level of the remainingportion of the substrate. A step 42 is accordingly formed in one or moreembodiments.

Finish metallurgy is deposited in some embodiments and is in electricalcommunication with the previously formed wiring 30. Finish metallurgymay comprise copper having a finish layer of Ni/Au or alternativemetallurgy that facilitates wetting. A test probe substrate 50 is shownin FIG. 5A. FIG. 5B shows such a test probe substrate including finishmetallurgy. The finish metallurgy 75, such as Cu/Ni/Au, Cu/NiFe/Au,Ti/Cu/Ni/Au, TiW/Cu/Ni/Au, Cu/Ni/Pt or Cu/Ni/Rh or alternate compositionare used to complete the structure for contact. The finish metallurgiesmay have a thin bonding metallurgy such as Ti or TiW of <0.1 μm, Cu, Nior NiFe metallurgies on the order of 0.1 to 5 μm, or Au, Pt, Rh or otherfinish metallurgy of <0.5 μm. Finish metallurgy is usually deposited ontop of underlying Cu or other metallurgical via or wire and is not usedto fill openings such as described above with respect to FIG. 4. Wiring77 within the substrate 20 and electrically contacting the contactlocations 22, 22A of the probe substrate 20 is further shown in theschematic illustration.

In an alternative embodiment, the finish metallurgy may comprise copperpillars having solder tips or solder interconnection bumps 62. Thestructure 60 shown in FIG. 6 is obtained in such a manner. The copperpillars may be formed by electroplating or other suitable process. TheIMS head 32 may again be employed to fill the openings 40. In someembodiments, the solder may remain solder after fill. In otherembodiments, a heat treatment causes conversion of the solder to anintermetallic compound such as Cu₆Sn₅ or alternate composition(s). Thesurface pads can have additional copper pillars (not shown) plated withsubsequent surface finishing metallurgy. Alternatively, the pads mayinclude added solder by means of the IMS head 32 that injects moltensolder to add height above the finished pads or finished pillarmetallurgical structures. Bumps 62 extending above the surface of thedielectric layer 38 are formed upon solidification of the solder.

In one or more embodiments, copper pillars are formed in the openings 40in the dielectric layer 38 or on top of finished metallurgy, for examplecopper pillars extending 5 to 40 μm above the filled openings.Alternatively, a solder deposited by IMS can fill the openings 40 or bedeposited on top of the filled openings 40. Solder above the surface ofthe structure can be deposited through a mask (not shown) using IMS orcan be otherwise filled into a resist (not shown) that has openingsabove the dielectric layer 38 and then resist stripped after filling.The bumps 62, like the openings 40 from which they extend, are arrangedin parallel rows that are correctly aligned for interfacing with thesurface contacts of the test substrate or an intermediate structure suchas an interposer layer. The bumps are also substantially coplanar eventhough the surface of the underlying substrate 20 may not be.

A further alternative embodiment is shown in FIG. 7. Fine pitch testprobes are required for some applications where the surface contacts ofelectronic devices to be tested have a pitch of about one hundred fiftymicrons or less. A test probe substrate 70 as shown in FIG. 7 isfabricated once a structure such as shown in FIG. 6 is obtained. Asilicon interposer layer 72 (or layers) is attached to the structureusing flip chip attachment (controlled collapse chip attachment)techniques, thermal compression bonding (with or without integratedadhesive and interconnections) or alternative attachment techniques. Anadhesive underfill 73 is applied in one or more embodiments. Theinterposer layer 72 is configured (wired) to function as aredistribution layer wherein the pitch of the wiring layer 30 formed onthe substrate 20 is transposed to the pitch required for the wafer to betested. The silicon interposer layer 72 includes probe tips 74 in one ormore embodiments conforming to the layout of surface contacts of theintegrated circuit or other device to be tested. In some embodiments,the probe tips comprise shaped copper pads with contact metal depositionsuch as Ni/Au or Pt or alternative metallurgy. The interposer layer islikely to be used for transposing a relatively large pitch layout (e.g.two hundred microns), such as the layout of bumps 62 shown in theexemplary embodiment of FIG. 6, to a layout of probe tips 74 having afiner layout (e.g. one hundred microns) for wafer testing. Theinterposer layer 72 is planar and the contacts on the interposer forinterfacing with the contact regions (e.g. bumps 62) of the underlyingstructure (e.g. structure 60) are also coplanar. The planarity of thecontact surface formed by the final dielectric layer 38 and correctalignment of the contact regions associated with the contact surfaceaccordingly facilitate proper attachment to the interposer layer 72.

Given the discussion thus far, an exemplary fabrication method includesobtaining a structure comprising a probe substrate 20 including a topsurface, one or more contact locations 22, 22A, and electricalconductors 77 within the substrate, the contact locations beingelectrically connected to one or more of the electrical conductors andforming a first dielectric layer 24 over the top surface of thesubstrate. A plurality of first openings 26 is formed within the firstdielectric layer 24, thereby exposing a plurality of the contactlocations. Lateral extensions, for example tails 28 as shown in FIG. 2,of one or more of the openings 26 are formed within the first dielectriclayer. An electrically conductive material 30 is deposited within thefirst openings 26 and lateral extensions 28. The method further includesdepositing a second dielectric layer 38 over the first dielectric layerand forming a plurality of second openings 40 within the seconddielectric layer, one or more of the second openings communicating withthe lateral extensions. An electrically conductive material 30 isdeposited within the second openings to form an array of electricalcontact regions electrically connected to the contact locations. Thesecond dielectric layer is planarized. In one or more embodiments, thestep of depositing an electrically conductive material within the firstopenings 26 and lateral extensions 28 includes injecting molten solder,such as illustrated in FIG. 3. In some embodiments, the substrate iscomprised of ceramic material (e.g. LTCC) and the first dielectric layer24 comprises a polyimide adhesive. Substrates formed from glass,silicon, and organic materials are employed in other embodiments. Someembodiments of the exemplary method further include the steps ofattaching an interposer layer 72 having a bottom surface and a topsurface to the substrate over the second dielectric layer, theinterposer layer including electrically conductive probe tips 74extending from the top surface of the interposer layer, and causing theelectrical connection (for example by solder reflow) of the probe tipsto the contact locations of the substrate. FIG. 7 shows a structure 70including such an interposer layer. In some embodiments, the seconddielectric layer 38 is deposited directly on the first dielectric layer24. In other embodiments, intermediate dielectric layers are formedbetween the first and second dielectric layers. Finish metallurgy 75 isformed on the contact regions in some embodiments, as shown for examplein FIG. 5B. Both the first and second dielectric layers are planarizedin one or more embodiments. The method may further include the steps ofmapping three dimensional (x, y and z) coordinates of the contactlocations 22, 22A, storing the mapped coordinates electronically in amemory device, comparing the stored coordinates to a set ofpredetermined coordinate positions, and determining a set of storedcoordinates that do not match the set of predetermined coordinatepositions. At least the step of forming the lateral extensions isperformed using the set of stored coordinates that do not match the setof predetermined coordinate positions. As discussed above, the lateralextensions address the misalignment of contact locations. The storedcoordinates may further be employed for controlling the planarizing ofone or more dielectric layers.

A further exemplary fabrication method includes obtaining a test probesubstrate 20 including a top surface and a plurality of contactlocations 22, 22A electrically connected to one or more of theelectrical conductors. The method further includes determining whetherthe contact locations 22, 22A match predetermined coordinate positions.A first dielectric layer 24 is formed over the top surface of thesubstrate and a plurality of first openings 26 are formed within thefirst dielectric layer, thereby exposing a plurality of the contactlocations. Lateral extensions of the first openings are formed in thedirections of the predetermined coordinate positions for the contactlocations that do not match the predetermined coordinate positions. Anelectrically conductive material 30 is deposited within the firstopenings and lateral extensions such that the conductive materialcontacts the contact locations 22, 22A. A second dielectric layer 38 isdeposited over the first dielectric layer. A plurality of secondopenings 40 are formed within the second dielectric layer matching thepredetermined coordinate positions, one or more of the second openingscommunicating with the lateral extensions 28. An electrically conductivematerial 30 is deposited within the second openings 40 to form an arrayof electrical contact regions electrically connected to the contactlocations and conforming to the predetermined coordinate positions. Thesecond dielectric layer is planarized. In some embodiments, the seconddielectric layer 38 is deposited on the first dielectric layer and thefirst dielectric layer 24 is deposited on the top surface of thesubstrate. As discussed above, the first dielectric layer 24 isplanarized in some embodiments of the exemplary method.

A test probe structure in accordance with an exemplary embodimentincludes a substrate 20 including a top surface, a plurality of rows ofcontact locations 22, 22A, and electrical conductors 77 within thesubstrate, the contact locations being electrically connected to one ormore of the electrical conductors, one or more of the contact locations22A being misaligned with respect to one or more of the rows. A firstdielectric layer 24 is on the top surface of the substrate. A pluralityof first openings 26 corresponding to the contact locations extendthrough the first dielectric layer 24, each of the first openings beingaligned with a corresponding one of the contact locations. At least oneof the first openings corresponds to one of the misaligned contactlocations 22A and includes a lateral extension 28. A second dielectriclayer 38 is positioned over the first dielectric layer. A plurality ofsecond openings 40 extends through the second dielectric layer, thesecond openings being arranged in rows corresponding to the rows ofcontact locations 22, 22A. The second openings are arranged in rowswithout misalignment. An electrically conductive material 30 is withineach of the first and second openings and the lateral extension, theelectrically conductive material contacting the contact locations. Thesecond dielectric layer includes a planar top surface.

The terminology used herein is for the purpose of describing particularembodiments only and is not intended to be limiting of the invention. Asused herein, the singular forms “a”, “an” and “the” are intended toinclude the plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises”and/or “comprising,” when used in this specification, specify thepresence of stated features, steps, operations, elements, and/orcomponents, but do not preclude the presence or addition of one or moreother features, steps, operations, elements, components, and/or groupsthereof. Terms such as “above” and “below” are used to indicate relativepositioning of elements or structures to each other as opposed torelative elevation.

The corresponding structures, materials, acts, and equivalents of allmeans or step plus function elements in the claims below are intended toinclude any structure, material, or act for performing the function incombination with other claimed elements as specifically claimed. Thedescription of the various embodiments has been presented for purposesof illustration and description, but is not intended to be exhaustive orlimited to the forms disclosed. Many modifications and variations willbe apparent to those of ordinary skill in the art without departing fromthe scope and spirit of the invention. The embodiments were chosen anddescribed in order to best explain the principles of the invention andthe practical application, and to enable others of ordinary skill in theart to understand the various embodiments with various modifications asare suited to the particular use contemplated.

What is claimed is:
 1. A test probe structure comprising: a substrateincluding a top surface, a plurality of rows of contact locations, andelectrical conductors within the substrate, the contact locations beingelectrically connected to one or more of the electrical conductors, oneor more of the contact locations being misaligned with respect to one ormore of the rows; a first dielectric layer on the top surface of thesubstrate; a plurality of first openings corresponding to the contactlocations and extending through the first dielectric layer, each of thefirst openings being aligned with a corresponding one of the contactlocations, at least one of the first openings corresponding to one ofthe misaligned contact locations and including a lateral extension; asecond dielectric layer over the first dielectric layer; a plurality ofsecond openings extending through the second dielectric layer, thesecond openings being arranged in rows corresponding to the rows ofcontact locations, the second openings being arranged in rows withoutmisalignment; an electrically conductive material within each of thefirst and second openings and the lateral extension, the electricallyconductive material contacting the contact locations, and the seconddielectric layer including a planar top surface.
 2. The test probestructure of claim 1, wherein the second dielectric layer adjoins thefirst dielectric layer and at least one of the second openings isaligned with the lateral extension of the at least one of the firstopenings.
 3. The test probe structure of claim 1, wherein the substratecomprises a ceramic material and the top surface of the substrate isnon-planar.
 4. The test probe structure of claim 3, wherein theelectrically conductive material comprises solder.
 5. The test probestructure of claim 1, further including an interposer layer attached tothe top surface of the second dielectric layer, the interposer layerincluding electrically conductive probe tips electrically connected tothe contact locations via the electrically conductive material withinthe first and second openings.